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Axcelis GSD HE Implanter
Axcelis GSD HE Implanter
Axcelis GSD HE Implanter
Axcelis GSD HE Implanter
Axcelis GSD HE Implanter
Axcelis GSD HE Implanter
Axcelis GSD HE Implanter
Axcelis GSD HE Implanter
Axcelis GSD HE Implanter
Axcelis GSD HE Implanter
Axcelis GSD HE Implanter
Axcelis GSD HE Implanter
Axcelis GSD HE Implanter
Axcelis GSD HE Implanter
Axcelis GSD HE Implanter
Axcelis GSD HE Implanter
Axcelis GSD HE Implanter
Axcelis GSD HE Implanter
Axcelis GSD HE Implanter
Axcelis GSD HE Implanter
Axcelis GSD HE Implanter
Axcelis GSD HE Implanter
Axcelis GSD HE Implanter
Axcelis GSD HE Implanter

Axcelis GSD HE Implanter

Asset #: 83370

Make: Axcelis

Model: GSD HE

Wafer Sizes: 6 inch

Last Confirm Date: September 17, 2024

Axcelis GSD HE Implanter, 6"
- Wafer can be converted back to 8"
- Refurbished
- Refurbishment of isolation transformer
- All assembly refurbished and fitted with new consumables
- Complete refurbishment of resonant cavities (LINACs, resonator DI boards and RF power supplies)
- Chamber and beamline CO2 cleaned and diamond polished to return to as-new condition
- Two new SAC IHC ion sources
- System tested to original equipment manufacturers specification
Replacement of:
- Both front and rear Cyro pumps by the OEM
- Valves, gate valves, and vacuum valves
- Mechanical and booster pumps
- High voltage power supply
- Terminal power supplies (filament, bias, arc, magnet, source magnet)
- All gas box elements
- All water lines and fittings
- Pneumatic lines where required (inspected)
A low pressure H2 upgrade was performed:
- High level of safety: No stored H2, but on demand instant generation
- No gas stock management
- Very simple and easy-going technology
- Beam performances similar to H2 pressure technology
- Fully CE compliant

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