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FSI Mercury MP Spray System
FSI Mercury MP Spray System
FSI Mercury MP Spray System
FSI Mercury MP Spray System
FSI Mercury MP Spray System
FSI Mercury MP Spray System
FSI Mercury MP Spray System
FSI Mercury MP Spray System
FSI Mercury MP Spray System
FSI Mercury MP Spray System

FSI Mercury MP Spray System

Asset #: 83316

Make: FSI

Model: Mercury MP

Wafer Sizes: 6 inch

Last Confirm Date: September 11, 2024

FSI Mercury MP Spray System, 6"
- Corzan exhaust with process exhaust monitoring
Chemicals used:
- Canister console one with:
- Canister H2SO4
- Canister NH4OH
- Canister console two with:
- H2O2
- Canister console exhaust monitoring installed
- 4 x paddlewheel flow pick up (H2SO4; NH4OH; H2O2 and DIMIX)
- Turntable style: 6” Turntable with 6 positions / 240V operation
Motor and motor speed controller:
- LC4CP11001 motor controller PN: 3690-01678
- Brushless Servomotor Pacific Scientific PN: 409244-003
Additionally:
- Booster pump: Not installed
- Helios:400VAC 52KW
- IR Heater: Not installed
- Ti T/C's: TC’s installed in Helios heater
- Vertical lift kit: No lift installed
- Center SP etch probe: Dual etch probe installed
- SBSP: Sidebowl spraypost installed
- SBSP Etch probe: Not installed
- Manifold type: Single manifold with 4 flow controllers installed
- Recirculation: No recirculation installed
- Photohelic monitor: Photohelic process exhaust monitoring and canister exhaust monitoring
- Autofill: Autofill option installed
- SECS: SECSII communication installed
- Software: 9.94
- Operating system: 486 CPU PCB
1994 Vintage

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