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KLA-Tencor Archer XT+ Overlay Measurement System

Asset #: 83162

Make: KLA-Tencor

Model: Archer XT+

Last Confirm Date: September 04, 2024

KLA-Tencor Archer XT+ Overlay Measurement System
- Software version: 5.60
New / Refurbished Items:
- New system consumable parts: Shutter, HLS Lamp & Air Filters
- New System power supplies
- New Pneumatic panel valves & Air / Vac / Exhaust lines fitted
- Refurbished AMS camera assembly
- Refurbished HLS (Halogen Light Source) assembly
- Refurbished X/Y/T stage
- Refurbished IDE flotation table
- Refurbished system PC with new hard-drives
Robot Handler Options:
The system can be configured with all handler types
- Dual port 200mm open handler
- Dual port 200mm SMIF handler
- Dual port 300mm Phoenix Yaskawa handler
- Tripel port 300mm Phoenix Kawasaki

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