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ASM E 2000 EPI Reactor
ASM E 2000 EPI Reactor
ASM E 2000 EPI Reactor
ASM E 2000 EPI Reactor
ASM E 2000 EPI Reactor
ASM E 2000 EPI Reactor
ASM E 2000 EPI Reactor
ASM E 2000 EPI Reactor
ASM E 2000 EPI Reactor
ASM E 2000 EPI Reactor
ASM E 2000 EPI Reactor
ASM E 2000 EPI Reactor
ASM E 2000 EPI Reactor
ASM E 2000 EPI Reactor
ASM E 2000 EPI Reactor
ASM E 2000 EPI Reactor
ASM E 2000 EPI Reactor

ASM E 2000 EPI Reactor

Asset #: 82979

Make: ASM

Model: E 2000

Wafer Sizes: 6 inch

Last Confirm Date: August 26, 2024

ASM E 2000 EPI Reactor, 6"
- Has TCS with ASM LVC, integrated LPE bubbler
- Technology: Std Epi
- 480V, 60Hz, 150A
- EMO Switch Type: 3
- EMO Guard Ring
- EMO Label
- System Labels in English
- Leak Detectors
- Gas Type: H2
- Location: WHC
Chamber:
- Process Type: ATM
- Injector Mode: Multipoint
- TEK option: no
- X-TC Bi-Junction Option: no
- Reflector Options: Glossy
Gas Delivery Options:
- ATM Capability
- MFC: Horiba z 500 Aero D 981
- Filter: Pall
- Regulators: Gauge
- SiHCI3 Bubbler Cabinets: Integrated LPE
Chamber Gas Options:
- H2 200SLM
- Dopant 1SRC: 300 sccm
- Dopant 1 DIL: 20SLM
- Dopant 1 INJ: 200 sccm
- Dopant 2 SRC: 300sccm
- Dopant 2 DIL: 20SLM
- Dopant 2 INJ: 200sccm
- Dopant 3 SRC: not used
- HCL Main: 20SLM
- SiHCI3: yes / LVC H2/5slm Qualiflow
- Rotation Purge: H2 5SLM
Mainframe: Left Hand
Loadlock:
- Standard
- Wafer Out Sensing
- Slot Mapping
Chamber Options:
- Blower with Damper
- ATM
- ATM Prs Detected Switch
- Over Prs Detected Switch
- ISO Lation Valve: HVA Type
Fab / Controller Interface:
- SECS
- SECS Transaction Type: HSMS
- Software Vs.: 7.6
Facilities:
- Cooling Water: MID
Transfer Chamber
- Wafer Sensing
- Robot: Standard
- Vacuum Hose: Single
- WHC to Chamber Valve: Gate Valve
System Monitors:
- Monitor Type: LCD (2)
- Installation: Thru wall
Cable Lengths:
- Controller to Mainframe: 4m
- Controller to Power Box: 6m
- Power Box to Mainframe: 6m
Gas Line:
- Gas Modle (valve): ok
- Reactor (valve) : ok
- WHC (valve): ng
- RP Load LOK: ng
- Tube: ng
Parts / Tools and Kits:
- Center TC Meter
- Process Tube Centering / Leveling Tool
- Parts: 150mm blade and HT cassettes
2000 Vintage

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