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Karl Suss ACS 300 Gen 2 Coater Developer
Karl Suss ACS 300 Gen 2 Coater Developer
Karl Suss ACS 300 Gen 2 Coater Developer

Karl Suss ACS 300 Gen 2 Coater Developer

Asset #: 82521

Make: Karl Suss

Model: ACS 300 Gen 2

Last Confirm Date: August 12, 2024

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Karl Suss ACS 300 Gen 2 Coater Developer, 8" to 12"
Includes:
- Module Coat/Bake/Develop Cluster
- System tooling for 200/300 mm semi spec wafer sizes
- Touch Panel PC with Windows10® operating system
- SECS/GEM Compatibility
- Wafer I/O via 4x Sinfonia SELOP7 Loadports with dedicated handling robot
- Additional robot for process module handling
- Active filterhoods for both I/O and machine
- CO2 Fire Suppression Kit
Modules include:
- Gyrset Spin Coating/Developing (qty 2)
- Aqueous Develop (qty 2)
- Temperature Stack (qty 1)
Gyrset Spin Coater Module (qty 2)
Includes:
- Gyrset Coater
- 4x Programmable Dispense Arm (2 per each module)
- 4x Suss Programmable Dispense System (2 per each module)
- 3x Solvent Dispense Nozzle
- Integrated Back Side Rinse and Splash Ring Rinse
- Edge Bead Removal
- Automated Bowl Clean
- Nozzle Clean
- 1x Solvent switching function (available only in one module)
- Resist supply via 2x Resist Bottle holder and 1x CPD-4 pressurized vessel stored
- Solvent supply via 1x 20L Pressure Tank auto-switching system and 2x 20L Pressure Tank system
- 2x 20L Waste Tank (1 per each module)
Developer Module (qty 2)
- 2x Puddle/Spray Develop Dispense System (1 per each module)
- 2x Binary Spray Dispense System (1 per each module)
- 2x Nitrogen drying (1 per each module)
- Back Side Rinse
- Automated Bowl Clean
- Temperature Control Unit
- Developer media supply via 1x 20L Pressure Tank auto-switching system
- Filters for all media
Temperature Stack Module (qty 1)
Includes:
- 9x 250C Hotplate with programmable proximity
- 3x Coolplate with programmable proximity

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