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Leica / Raith EBPG 5000 Plus E-Beam Writer, Evacuate & Load Control
Leica / Raith EBPG 5000 Plus E-Beam Writer, Evacuate & Load Control
Leica / Raith EBPG 5000 Plus E-Beam Writer, Evacuate & Load Control
Leica / Raith EBPG 5000 Plus E-Beam Writer, Evacuate & Load Control
Leica / Raith EBPG 5000 Plus E-Beam Writer, Evacuate & Load Control
Leica / Raith EBPG 5000 Plus E-Beam Writer, Evacuate & Load Control
Leica / Raith EBPG 5000 Plus E-Beam Writer, Evacuate & Load Control
Leica / Raith EBPG 5000 Plus E-Beam Writer, Evacuate & Load Control
Leica / Raith EBPG 5000 Plus E-Beam Writer, Evacuate & Load Control

Leica / Raith EBPG 5000 Plus E-Beam Writer, Evacuate & Load Control

Asset #: 75247

Make: Leica / Raith

Model: EBPG 5000 Plus

Last Confirm Date: November 17, 2023

Leica / Raith EBPG 5000 Plus E-Beam Writer, Evacuate & Load Control
- FEG version
- 400/230V
- 3 Phase
With:
- Dual Seiki turbo pumps
- Dual Varian Noble Diode ion pumps
- Accommodates up to 6in substrates
- Substrate holders for 1in to 6in substrates
Includes:
- CER1 vacuum control cabinet
- CER2 optics control cabinet w/ 4ea - Advance Hivolt IP100/702/01 ion pump power supplies
- Power control cabinet EC rack SA-EHT SAHT rack
- BOC Edwards IL70 vacuum pump
- Lytron RC022J02BB2 chiller
- Leica VB5 mask alignment microscope w/ MZ75 optical head, 25x/9.5B eyepieces, CLS150X illuminator, table operator desk
- U502 5-in maskholder
- U469 5-in maskholder
- U482 4-in maskholder
- U480 5-in maskholder
- TMC Stacis III DC 2020 controller
- Hipotronics HD115 hipot tester
- Manuals & drawings
- Software CDs
- Seismic restraints
- Cables, vacuum/water hose, tools & rigging accessories
- Transport case
2011 Vintage

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