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EVG 6200 NT Semi Automated Bottom Side Alignment System
EVG 6200 NT Semi Automated Bottom Side Alignment System
EVG 6200 NT Semi Automated Bottom Side Alignment System
EVG 6200 NT Semi Automated Bottom Side Alignment System
EVG 6200 NT Semi Automated Bottom Side Alignment System
EVG 6200 NT Semi Automated Bottom Side Alignment System
EVG 6200 NT Semi Automated Bottom Side Alignment System
EVG 6200 NT Semi Automated Bottom Side Alignment System
EVG 6200 NT Semi Automated Bottom Side Alignment System
EVG 6200 NT Semi Automated Bottom Side Alignment System
EVG 6200 NT Semi Automated Bottom Side Alignment System
EVG 6200 NT Semi Automated Bottom Side Alignment System
EVG 6200 NT Semi Automated Bottom Side Alignment System
EVG 6200 NT Semi Automated Bottom Side Alignment System
EVG 6200 NT Semi Automated Bottom Side Alignment System
EVG 6200 NT Semi Automated Bottom Side Alignment System
EVG 6200 NT Semi Automated Bottom Side Alignment System
EVG 6200 NT Semi Automated Bottom Side Alignment System
EVG 6200 NT Semi Automated Bottom Side Alignment System
EVG 6200 NT Semi Automated Bottom Side Alignment System
EVG 6200 NT Semi Automated Bottom Side Alignment System
EVG 6200 NT Semi Automated Bottom Side Alignment System
EVG 6200 NT Semi Automated Bottom Side Alignment System
EVG 6200 NT Semi Automated Bottom Side Alignment System
EVG 6200 NT Semi Automated Bottom Side Alignment System

EVG 6200 NT Semi Automated Bottom Side Alignment System

Asset #: 73391

Make: EVG

Model: 6200 NT

Wafer Sizes: 2, 3, 4, 5, 6, 8, 12 inch

Last Confirm Date: June 26, 2024

EVG 6200 NT Semi Automated Bottom Side Alignment System, up to 8"
- Double side
- Manual handling
- Exposure Modes: Hard, Soft, & Vacuum Contact
- Separation Distance: 0 - 300 µm adjustable via software
- Wafer Thickness: 0.1 - 10 mm (For Top Side)
- Semi Automatic Loading with Mechanical Prealignment on Chuck
- Quick change of Mask and Chuck
- One Stage Rack for Up to 5 Aligner Tools
- EC Decleration of Conformity (Certification done by EVG)
- PC Controlled Operational Environment
- Solid State Drive and Hard Drive for High Availability and Reliability
- Graphical User Interface (GUI) for Visualization
- User Interface Including Keyboard and Monitor
- Granite Base Frame Construction and Active Vibration Isolation
2017 Vintage

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