Hitachi S 3000 N SEM
- Variable Pressure (Low Vacuum)
- 6" Stage
- Windows XP Operating System
- HP DC 7600
- Software Options:
- Measurement
- PCI Interface (Image management)
- H.R. Image Memory
- SEM Data Management
- Full Screen
- 5 Axis Stage
- 4 Quadrant Backscatter Detector
- ESED (AED) Advanced Detector
- Option to add EDX for an additional cost
Specifications:
1. Resolution:
- Secondary electron image resolution: 3.0 nm (High Vacuum Mode)
15 nm (Accelerating voltage 3kV)
2. Magnification:
- 15x to 300,000x (65 steps) Normal mode
- 5x to 300,000x (75 steps) Low mag mode
-(x5 : WD = 35 mm, Accelerating voltage 2kV)
3, Electron Optics:
(1) Filament: Pre-centered tungsten hairpin type
(2) Gun bias: Self-bias + continuously variable bias
(3) Accelerating voltage:
-0.3 to 30 kV (1171 steps)
-0.3 to 9.99 kV (in increments of 10 V)
-10 to 30 kV (in increments of 0.1 kV)
(4) Emission current: 10^-12 to 10^-7 A
(5) Gun Alignment: 2-stage electromagnetic alignment
(6) Condenser lens: 2-stage electromagnetic condenser
(7) Objective lens: Super-conical lense
(8) Objective lens aperture: 4-opening movable aperture
(9) Stigmator coil: 8-pole electromagnetic X/Y correction for astigmatism
(10) Image shift: ± 20 μm or more (W.D. = 15 mm)
4. Specimen Stage
One of the following five types of specimen stages is selectable.
(a) Super-eucentric stage
Movement range: 32 mm x 32 mm
Tilt angle: -90° to +90°
Rotation angle: 360°
(b) Standard stage
Movement range: 80 mm x 40 mm
Tilt angle: -20° to +90°
Rotation angle: 360°
(c) Large-size eucentric stage
Movement range: 100 mm x 50 mm
Tilt angle: 0° to +60°
Rotation angle: 360°
(d) Cool stage 20
Movement range: 15 mm x 15 mm
Tilt angle: -45° to +45°
Temperature range: +10° C to -20° C
(e) 5-axis stage
Movement range: 100 mm x 50 mm
Tilt angle: 0° to +60°
Rotation angle: 360°
5. Image Display
(1) Kinds of images:
- Secondary electron image (only in HIGH VACUUM mode)
- Back-scattered electron image (Semiconductor method)
(2) Scanning modes
- TV scan
- Slow scan (4 steps)
- Selected area scan
- Waveform monitor/signal monitor
- Photo scan (4 steps)
- Twin photo scan
- Dual-magnification scan
(3) Scanning speeds
- TV scan
- Slow 1: 0.35 s (X = 0.7 ms, Y = 480 lines)
- Slow 2: 2 s (X = 4 ms, Y = 480 lines)
- Slow 3: 10/8 s (X = 20/16.7 ms, Y = 480 lines)*
- Slow 4: 20/24 s (X = 40/50 ms, Y = 480 lines)*
- Selected area:
70 ms (F) (X = 0.45 ms, Y = 160 lines One-stage filter)
70 ms (M) (X = 0.45 ms, Y = 16- lines, Two stage filter)
320 ms (S) (X = 2 ms, Y = 160 lines)
- Photo 1: 40/33 s (X = 20/16.7 ms, Y = 1920 lines)*
- Photo 2: 80/100 s (X = 40/50 ms, Y = 1920 lines)*
- Photo 3: 200/200 s (X = 100/100 ms, Y = 1920 lines)*
- Photo 4: 400/400 s (X = 200/200 ms, Y = 1920 lines)*
(*: Synchonized with power frequency of 50/60 Hz)
(4) Signal processing (analog operation
Image polarity reversal
Image differentiation
Gamma Control
(5) Data display: Accelerating voltage, magnification, micron scale, micron value, film number, W.D. value, date/time, vacuum level, photo magnification, detector
(6) Data entry: Input through full keyboard (alphabetic characters, numerics, symbols), Graphic input (straight lines, circles, arrows, etc.)
(7) VTR signal input
6. Image memory
(1) For display (640 x 480)
(2) For high resolution (1280 x 960)
(3) For ultra-high resolution (2560 x 1920) (Option)
(4) Memory functions: Scan conversion, recursive filter (applicable modes: TV, Slow 1, slow 2), image integration (2 to 1024 images) (Applicable modes: TV, Slow 1 to Slow 4), Brightness conversion (LUT: Look-up table method), Intermediate level emphasis, gamma control, N-ary conversion, Pseudo color, Histogram presentation, 4-split screen presentation
7. Automatic Functions
- Auto brightness and contrast (ABC)
- Auto stigmatism and focus (ASF)
- Auto focus (AFC)
- Auto filament saturation (AFS)
- Auto gun alignment (AGA)
- Auto start (HV-ON-> AFC-> ABC)
- Auto photographing (1. AFC -> ABC-> Photo) (2. ABC -> Photo)
- Full auto mode (1: AFS -> AGA-> AFC -> ABC) (2: AGA-> AFC -> ABC)
8. Operation Support Functions
- Operation principle: Graphical user interface / simplified menus
- Control devices: Mouse, dedicated rotary knob, full keyboard
- Magnification presetting (Arbitrary magnification settable)
- Axial alignment wobbler
- Condition registration (15 conditions, to be registered unlimitedly)
- Focus search
- Focus memory
- ABC Brightness setting
- Film sensitivity compensation
- Photo magnification compensation
- Photo-only brightness setting
- Scan point indication
- Filament image
- Status list indication
9. X-Ray Analysis Mode
- Signal input terminals (equipped for each of two systems), X-ray rate meter signal terminal (0 to +10 V), Mapping signal terminal (TTL)
- Scan mode: Line analysis, spot analysis, selected area analysis
- Analysis position: W.D = 15 mm, X-ray take-off angle (TOA) = 35°
10. Vacuum System:
- Principle: Full-auto pneumatic valve control evacuation
- Vacuum gauge: Pirani Gauge
- Indications: LED, menus
- Ultimate vacuum: 1.5 x 10^-3 Pa
- Variable pressure mode: Variable pressure range: 1 to 270 Pa, Vacuum level setting: Selectable from 25 steps via dialog
- Vacuum pumps: Oil diffusion pump (DP): 570 L/s for high vacuum, oil rotary pump 1 (RP 1): 135 (162) L/min, for DP back pressure evacuation only, Oil rotary pump 2 (RP 2): 135 (162) L/min, for pre-evacuation/low-vacuum setting
11. Protective devices: Protection against power outage and water supply interruption
12. Standard System Composition:
- Column unit (1)
- Display unit (1)
- PC unit (1)
- Oil rotary pump (2)
- Compressor (1)
- Standard tools (1 set)
- Spare and consumable parts (1 set)
- Instruction manual (1 copy)