Intevac Matrix Solar PVD Thin Film System
Overview:
- Multiple chamber system enabling multi-layer thin film solar cell PVD applications (IBC, Cu Seed, HJT, PERL/T)
- Fully integrated automation for small substrate handling (low wafer breakage < 0.03%)
- High speed transport and carrier technology for high system throughput (> 3000 wph, application dependent)
- Enabling source technology (LSMA) for high target utilization and low cost of ownership
- Integrated deposition chambers for advanced solar cell applications (Cu seed, PERL Back Metal, HJT)
- Multiple chamber load locks enable high quality vacuum (low E-07) in small footprint
- Short green-to-green time with chamber isolation (< 6 hours)
- Easy carrier modification to accommodate different substrate shapes and sizes (156mm, 125mm, square and pseudo-square)
Matrix Unique Design:
- Single row carrier design enables efficient PVD system through compact chamber dimensions
- Small carrier enables high productivity, low cost load / unload mechanism
- Overhead carrier return reduces footprint
- LSMA source enables lowest cost of ownership (target)
Matrix Automated Substrate Handling:
- Integrated automation load / unload
- High throughput (> 3000 wph)
- Reliable performance (< 0.03% breakage rate)
- Flexible substrate sizes
- Extendible to thinner wafers
Matrix Automation:
- Integrated automation load / unload
- High throughput (> 3000 wph)
- Reliable performance (< 0.03% breakage rate)
- Flexible substrate sizes
- Extendible to thinner wafers
LSMA Source:
- High target utilization (>65%)
- Scanning pole
- Tunable scan speed
- High scan acceleration
- Optimal edge erosion profile
- Uniform target temperature control enables stable film properties
- Planar target design beneficial for low target cost and complex materials
- Magnet array is optimized to the target material
- High magnet pole strength enables high pass-through flux (Magnetic films e.g. Nickel)