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Tel Trias Metal CVD
Tel Trias Metal CVD
Tel Trias Metal CVD
Tel Trias Metal CVD
Tel Trias Metal CVD
Tel Trias Metal CVD
Tel Trias Metal CVD

Tel Trias Metal CVD

Asset #: 61720

Make: Tel

Model: Trias

Last Confirm Date: October 25, 2021

Tel Trias Metal CVD
- Ti/TiN
- Configured for 4 chambers
Gas Supply Config
- Manual valve N*: Yes
- Regulator (N2-1/N2-2): Yes
- Regulator (N2-PF): Yes
- Regulator (Ar): Yes
- Pressure sensor (All gas line): No
- Filter (N2-PF): No
- Manual valve (Dry air line): Yes
- Filter (Dry air line): No
- Regulator (Dry air line): No
- Pressure sensor (Dry air line): No
- Pressure gauge (Dry air line): No
Chamber TEL TRIAS TIN
- 1333Pa Manometor: Yes
- 133kPa Capacitance manometer: Yes
- O-rings: Yes
- O-rings: Yes
- O-rings, Cubic Trap I/O: Yes
- Gate Valve (Slit Valve): Yes
- APC Valve: Yes
- Cubic Trap: Yes
- Vacuum valve(VEP1): Yes
- Vacuum valve(VEP2,3): Yes
- Pressure Gauge, exhaust system: Yes
- Flow Meter for cooling water: No
- Water Leak Sensor: Yes
Gas Box Configuration
- Gas Stick 1: Yes
- Gas Stick 2: Yes
- Gas Stick 3: Yes
- Gas Stick 4: Yes
- Gas Stick 5: Yes
- Gas Stick 6: Yes
- Gas Stick 7: Yes
- Gas Stick 8: Yes
- DLI: Yes
- Heater Bottom Purge: Yes
- Air Operation Valves: Yes
- Gas Filters: Yes
- Regulators: Yes
- Gas lockout system: Yes
Kit Parts:
- STAGE HEATER ASSY,ELPR STG HTR Ver2.4: Yes ( Ver2.5)
- TiN Shower Base: Yes
- "Inludes Plate Shower Spacer 300tin S1, Plate Shower Head
- 300tin, Block Gas Diffusion, Screw Long Head M6x15, Screw M6x28, Spring Washer Spak M6, Tube Gas Inlet 300tin, Washer Flat..M6 Ma22 Rglr:
- Ti Shower Head
- Ti Quartz Filler
- TiN Shower Plate
- TiN Shower Block"
2007 Vintage

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