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Balzers / Evatec BAK 1401 Evaporator
Balzers / Evatec BAK 1401 Evaporator
Balzers / Evatec BAK 1401 Evaporator
Balzers / Evatec BAK 1401 Evaporator
Balzers / Evatec BAK 1401 Evaporator
Balzers / Evatec BAK 1401 Evaporator
Balzers / Evatec BAK 1401 Evaporator
Balzers / Evatec BAK 1401 Evaporator
Balzers / Evatec BAK 1401 Evaporator
Balzers / Evatec BAK 1401 Evaporator
Balzers / Evatec BAK 1401 Evaporator
Balzers / Evatec BAK 1401 Evaporator
Balzers / Evatec BAK 1401 Evaporator
Balzers / Evatec BAK 1401 Evaporator
Balzers / Evatec BAK 1401 Evaporator
Balzers / Evatec BAK 1401 Evaporator
Balzers / Evatec BAK 1401 Evaporator
Balzers / Evatec BAK 1401 Evaporator
Balzers / Evatec BAK 1401 Evaporator

Balzers / Evatec BAK 1401 Evaporator

Asset #: 58099

Make: Balzers / Evatec

Model: BAK 1401

Wafer Sizes: 6 inch

Last Confirm Date: September 21, 2021

Balzers / Evatec BAK 1401 Evaporator, 6"
- Right Hand Open System
- (QTY: 2) Six pocket E-Guns
- 2 sources
- Holds Approx 48 6" wafers
- QCM and Coptical In-Situ thickness monitoring system
- Paramount 6013 6kW RF Gen
- Gases:  O2, HPN, Argon, N2, and one open
Pumping System:
- CTI Cryogenics on board system and Edwards Turbo, and 2 Kashiama 602 dry pumps
2019 Vintage

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