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Hitachi S 9380 II SEM
Hitachi S 9380 II SEM
Hitachi S 9380 II SEM
Hitachi S 9380 II SEM
Hitachi S 9380 II SEM
Hitachi S 9380 II SEM
Hitachi S 9380 II SEM
Hitachi S 9380 II SEM
Hitachi S 9380 II SEM
Hitachi S 9380 II SEM
Hitachi S 9380 II SEM
Hitachi S 9380 II SEM
Hitachi S 9380 II SEM
Hitachi S 9380 II SEM
Hitachi S 9380 II SEM
Hitachi S 9380 II SEM
Hitachi S 9380 II SEM
Hitachi S 9380 II SEM
Hitachi S 9380 II SEM
Hitachi S 9380 II SEM
Hitachi S 9380 II SEM
Hitachi S 9380 II SEM
Hitachi S 9380 II SEM
Hitachi S 9380 II SEM
Hitachi S 9380 II SEM
Hitachi S 9380 II SEM
Hitachi S 9380 II SEM

Hitachi S 9380 II SEM

Asset #: 51646

Make: Hitachi

Model: S 9380 II

Last Confirm Date: October 31, 2019

Hitachi S 9380 II SEM
- Measurement type: Cursor & Line profile method
- Measurement Area: 0.05 – 2.0 μm
- Repeatability: 3σ≦2nm
- Throughput: 24 wafer/ h (1 point/chip, 20chip/wafer)
- Secondary electron resolving power: 2nm Acceleration Voltage: 0.8kV
- SEM image: 1000 – 300000x
- Measurement repeatable precision security magnification : 40000 – 300000x
- Measurement mode: Auto measurement/ Manual measurement
Stage:
- Movement area: X-axis: 0 – 300mm / Y-axis: 0 – 300mm
- Drive type: Pulse motor drive
- Control: Leaser interferometry positioning control
- Drive speed: Max 200mm/sec (X-axis, Y-axis)
Loader:
- FOUP -> Loader chamber: Automated wafer transfer robot
- Loader stage -> Stage: Auto-vacuum, Auto-loading
Wafer Transfer Robot:
- Type: FOUP Random access type for FOUP / W hand robot
- Wafer detect on FOUP: FOUP opener (or Robot arm) with mapping sensor
- Chucking type: Vacuum chuck
- OF/Notch detect: Auto detect by leaser sensor
Electron Optics System:
- Acceleration voltage: 300 – 1600V (By 10V step variable)
- Lens system: Electromagnetic converging lens, Booster object lens
- Detection: Scintillator/Photomultiplier detector with EXB filter
- Object lens diaphragm: Heating process thin film drive diaphragm / (4 hole changer from outside vacuum)
- Scanning coil: 2 step electromagnetic polarization
- Astigmatism correction: 8 pole electromagnetic type (X,Y)
- Probe current monitor: Built-in Faraday cup with auto measurement function
- Optical microscope: VF about 1.2mm, with monochrome CCD
Controller & Monitor
- CRT: EWS 18inch LCD
- Scanning mode: TV scan
- Image process: Software image processing by filtering
- Safety system: EMO SW
- EWS: HP-UX B2600
Measurement Date Processing:
- File save function: Several measurement recipe file save function
- Save disk: 18GB HDD (Include system program)
- Sub-save disk: 3.5” MO disk drive, 3.5” FDD
- Date processing: Statistic calculation function by work sheet
Missing Parts: Dry Pump, Chiller, Earthquake-Proof Stand
2004 Vintage

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