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KLA-Tencor 2350 High Resolution Imaging Inspection
KLA-Tencor 2350 High Resolution Imaging Inspection
KLA-Tencor 2350 High Resolution Imaging Inspection
KLA-Tencor 2350 High Resolution Imaging Inspection
KLA-Tencor 2350 High Resolution Imaging Inspection
KLA-Tencor 2350 High Resolution Imaging Inspection
KLA-Tencor 2350 High Resolution Imaging Inspection
KLA-Tencor 2350 High Resolution Imaging Inspection
KLA-Tencor 2350 High Resolution Imaging Inspection
KLA-Tencor 2350 High Resolution Imaging Inspection
KLA-Tencor 2350 High Resolution Imaging Inspection
KLA-Tencor 2350 High Resolution Imaging Inspection
KLA-Tencor 2350 High Resolution Imaging Inspection
KLA-Tencor 2350 High Resolution Imaging Inspection
KLA-Tencor 2350 High Resolution Imaging Inspection
KLA-Tencor 2350 High Resolution Imaging Inspection
KLA-Tencor 2350 High Resolution Imaging Inspection
KLA-Tencor 2350 High Resolution Imaging Inspection
KLA-Tencor 2350 High Resolution Imaging Inspection
KLA-Tencor 2350 High Resolution Imaging Inspection

KLA-Tencor 2350 High Resolution Imaging Inspection

Asset #: 422

Make: KLA-Tencor

Model: 2350

Wafer Sizes: 8, 12 inch

Last Confirm Date: February 03, 2016

KLA-Tencor 2350 High Resolution Imaging Inspection, 8", 12"
- EFEM : 200mm Dual Open EFEM
- GEM SECS & HSMS
- Signal Light Tower (4 color) (R,Y,G,B)
- 150W Xenon Lamp
- Wave length of Illumination : 370 ~ 720nm
- Selectable wave length Band ( Visible , UV , I-line )
- Pixel Size : 160 ~ 250nm
- Current SW Ver : Can’t confirmed due to power off but HDD on position
System Dimension:
- Wafer size : 200mm or 300mm available
- Dimension:
IS 129.6(L) X 255.46(W) X 263.32(H) 2,703kg
UI 124.5(L) X 172.1(W) X 176.8(H) 520kg
- Current components cartoon : 4 cartoon
( IS , UI , Conditioner , EFEM ) ..
2001 Vintage

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