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Applied Materials AKT 1600 PECVD Cluster Tool
Applied Materials AKT 1600 PECVD Cluster Tool
Applied Materials AKT 1600 PECVD Cluster Tool
Applied Materials AKT 1600 PECVD Cluster Tool
Applied Materials AKT 1600 PECVD Cluster Tool
Applied Materials AKT 1600 PECVD Cluster Tool

Applied Materials AKT 1600 PECVD Cluster Tool

Asset #: 29826

Make: Applied Materials

Model: AKT 1600

Last Confirm Date: February 24, 2020

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Applied Materials AKT 1600 PECVD Cluster Tool
- AKT1600 is a 4 chamber PECVD production cluster tool used for display applications.
- The system is capable of transferring 300mm x 300mm square glass substrates. Wafer sensors are currently disabled on this system since they do not detect this size substrate correctly.
- It is equipped with a single loader module to the load lock chamber. The load lock chamber cassette has 13 slots.
- A heat chamber is located at the rear of the mainframe. It has a multislot cassette to store substrates between process chambers.
- A single blade robot in the transfer chamber moves the substrates throughout the system's chambers. It is a belt drive, frog-leg system with no Z-axis motion.
- The system is controlled by a Sun Sparc5 Workstation and is backed up by a UPS
- Chamber B is currently being used with RF power. Chambers A, C, and D are physically mounted, but are not connected to the vacuum system. The control systems for the chambers are enabled since the tool is looking for their signals to operate correctly.

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