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STS Multiplex ICP Etcher
STS Multiplex ICP Etcher
STS Multiplex ICP Etcher
STS Multiplex ICP Etcher
STS Multiplex ICP Etcher
STS Multiplex ICP Etcher

STS Multiplex ICP Etcher

Asset #: 131206

Make: STS

Model: Multiplex

Last Confirm Date: April 02, 2025

STS Multiplex ICP Etcher
- 400 V
- 50 Hz
- 3 Phase
With:
- MAG 900 CT Turbo Pump
- IPower Distribution & Control Rack Cabinet
- Electrogrip Electrostatic Driver
- VAT ACG 3 B 06 RF Generator
- ENI VL 400 Phase Shift Controller
- PowerBright VC 2000 Step Up/down Transformer
- BOC Edwards iQDP 80 Roughing Pump
- Neslab RTW 211 Recirculating Chiller
- Gas Cabinet
- Configured for 3 inch Substrates
2001 Vintage

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