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Varian E 220 Implanter
Varian E 220 Implanter
Varian E 220 Implanter
Varian E 220 Implanter
Varian E 220 Implanter
Varian E 220 Implanter
Varian E 220 Implanter
Varian E 220 Implanter
Varian E 220 Implanter
Varian E 220 Implanter
Varian E 220 Implanter
Varian E 220 Implanter
Varian E 220 Implanter
Varian E 220 Implanter
Varian E 220 Implanter
Varian E 220 Implanter
Varian E 220 Implanter
Varian E 220 Implanter
Varian E 220 Implanter
Varian E 220 Implanter
Varian E 220 Implanter
Varian E 220 Implanter
Varian E 220 Implanter
Varian E 220 Implanter
Varian E 220 Implanter
Varian E 220 Implanter
Varian E 220 Implanter
Varian E 220 Implanter
Varian E 220 Implanter
Varian E 220 Implanter
Varian E 220 Implanter
Varian E 220 Implanter
Varian E 220 Implanter
Varian E 220 Implanter
Varian E 220 Implanter
Varian E 220 Implanter
Varian E 220 Implanter
Varian E 220 Implanter
Varian E 220 Implanter
Varian E 220 Implanter
Varian E 220 Implanter
Varian E 220 Implanter
Varian E 220 Implanter
Varian E 220 Implanter
Varian E 220 Implanter
Varian E 220 Implanter
Varian E 220 Implanter
Varian E 220 Implanter
Varian E 220 Implanter
Varian E 220 Implanter
Varian E 220 Implanter
Varian E 220 Implanter
Varian E 220 Implanter
Varian E 220 Implanter

Varian E 220 Implanter

Asset #: 130199

Make: Varian

Model: E 220

Last Confirm Date: March 17, 2025

Varian E 220 Implanter
- 3 Phase
- 5 Wire
- 208 Volts
- E-clamp 6"
- Two loading chambers
- Single blade processing
- Implants Ar, AsH3, BF3 and PH3
Need to replace:
- Turbo Ion Source pump
- Turbo pump right side End Station
- Cryo pump and sub fab compressor
- Counter balance (needs repair)
- Fiber optic communication cards
- Power Supply controller (P/N E15001755)
- DI water filters
- Ion source cooling water quick coupling connections
1995 Vintage

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