SVG 661 HT Aligner, 6"
- Refurbished in 2022
- Process: Photo Exposure
- Heat Exchanger / Chiller: Blower
Software:
- OS 2000 Hardware and Software v29.x or Higher
- SEMI-GEM E 30 & HSMS # 37 Compliant Host Link
Mask / Wafer Handling:
- Elevator Platforms for 150 mm Wafer Fluoroware Cassettes
- 150 mm Wafer Handling & processing Capability with Extended Bellows Chuck
- Electronic Motorized Carousel Arm
- Pellicle Protection Mask Cassette System for 7.25" Round Masks
- One 7.25" Round Mask Carrier and Cassette
- Extended Life Mask X, Wafer X, & Pre Aligner Anchor Flexures
Optical:
- High Throughput Coated Optics (HT)
- UV4 Filter Set
- Narrow Band Secondary (UV4)
- Integrated Uniformity Tester
- AUDIT (Automated Uniformity Testing)
Focus / Viewing / Mag:
- Air Gauge Focus System
- Extended Life Gauge Head Flexure
- Mini-Mag Strong Shell Positioning
- AVM (Automated Variable Magnification)
- Brightfield and Darkfield for AFA (Automated Fine Alignment)
- GAS Scan Package
Environmental/Pneumatics:
- New Easy to Use Automated Helium Management System
- New Style High Reliability 300, 800, & 900 Manifolds
- New SMC Solenoid View Stop E-Brake Ass'y
Safety:
- New GFO Line Voltage Refrigerator
All New Hoses, Anodizing, and Paint Throughout Chamber Options:
- 1 Chamber
- Chamber Type: M 500 / 600
- Cassette Stage: 150 mm no smf
- Wafer Mapping: Optical Sensor
Modules & Systems:
- Control System: OS 2000
Air Cooler: 39,000 BTU 220 Vac 3 Ф