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Lam Rainbow 9600 SE II TCP Plasma Etcher
Lam Rainbow 9600 SE II TCP Plasma Etcher
Lam Rainbow 9600 SE II TCP Plasma Etcher
Lam Rainbow 9600 SE II TCP Plasma Etcher
Lam Rainbow 9600 SE II TCP Plasma Etcher
Lam Rainbow 9600 SE II TCP Plasma Etcher
Lam Rainbow 9600 SE II TCP Plasma Etcher
Lam Rainbow 9600 SE II TCP Plasma Etcher
Lam Rainbow 9600 SE II TCP Plasma Etcher
Lam Rainbow 9600 SE II TCP Plasma Etcher
Lam Rainbow 9600 SE II TCP Plasma Etcher
Lam Rainbow 9600 SE II TCP Plasma Etcher
Lam Rainbow 9600 SE II TCP Plasma Etcher
Lam Rainbow 9600 SE II TCP Plasma Etcher

Lam Rainbow 9600 SE II TCP Plasma Etcher

Asset #: 127903

Make: Lam

Model: Rainbow 9600 SE II TCP

Wafer Sizes: 6 inch

Last Confirm Date: January 22, 2025

Lam Rainbow 9600 SE II TCP Plasma Etcher, 6"
- With DSQ
- Convertible to 8"
- Wafer Type: Flat
- Vlave Type: VAT Pendulum Valve 65 Series
- SMIF: No
- Coated Aluminum ESC - Lam # 718 094756 061
- Bulkhead: Wall Facia are Missing
- Monochromator Endpoint: Dual Endpoint Detector - Lam # 853 001983 110
- Software: E 2.0.1-044
- RF: 3X on Board Trumpf Generators (Top, Bias, DSQ)
- Cart: No
- Robot Type: Harmonic Drive
- Loader Type: Hine Indexers 38 A
- Turbo Pumps: Alcatel ATH 1300 MT
Controllers:
- Adixen Magpower (Turbo Pump)
- 12 CH Anafaze Temp Controller
- AC 2 Controller (Throttle Valve)
- VAT PM 7 Controller ( VAT Pendulum Valve)
- Manual WVDS Controller
2005 Vintage
2005 Vintage

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