Hitachi S 9300 CD SEM

Asset # : 78960

Equipment Make: Hitachi

Equipment Model: S 9300

Type: CD-SEM

Wafer Size:

Equipment Configuration: With:
- Display Unit
- Load Port 1
- Mini Environment
- Chiller x2
- Pump Rack
- Load Port 2
- Main Power Supply
- MH3000 Unit (Robot Controller)
- Laser interferometer stage
- Mini-environment and FOUP compatible loadports
- Advanced automation scenarios

Equipment Pictures: