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Novellus Concept Two Altus W-CVD
Novellus Concept Two Altus W-CVD
Novellus Concept Two Altus W-CVD
Novellus Concept Two Altus W-CVD
Novellus Concept Two Altus W-CVD

Novellus Concept Two Altus W-CVD

Asset #: 77761

Make: Novellus

Model: Concept Two Altus

Wafer Sizes: 8 inch

Last Confirm Date: April 12, 2024

Novellus Concept Two Altus W-CVD, 8"
- Dual Altus, Non Shrink
- Nitride
- Load Type: SMIF, LPI2200
- Process Module Type: CVDW
- Chamber Position: B(3), C(4)
Transfer Module Configuration
- DLCM Type: DLCM-S
- Cssette Interface: Platform
- Robot Type: MAG7
- Arm Set: Dual Arm
- Cool Station: 3 Level
- Pressure Guage: MKS 100Torr
- Throttle Valve: MOV 015
- Throttle Valve Controller: ACX32101
Chamber Configuration:
- Chamber B CVD: C2-CVD-WS
- Chamber C CVD: C2-CVD-WS
- Pedestal: 200mm
- Throttle Valve: MDVX-100B
- Isolation Valve: 14040-PE44-AAL2
- RF Matcher: Trazer, AMU2-1
- RF Generator: AE, RFG 3000
No: dry pump, RF rack, pump rack
2000 Vintage

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