Hitachi S 4100 FE-SEM
- Manually operated 5 axis specimen chamber
- Manually operated specimen exchange port
- Can be upgraded with a National Instruments Vision Acquisition computer imaging system
Specifications:
Performance
- Secondary electron image resolution: 2.0nm at 30 KV
- Magnification: 20X - 300KX
Electron Optics:
- Electron gun: cold field emission source
- Lens type: electromagnetic
- Objective aperture: 4 position externally selectable
- Stigmator: octopole electromagnetic
- Scanning coil: 2-stage electromagnetic
Sample Chamber:
Size Type I
- Airlock: prepumped
- Max sample size 100mm diameter
- Stage motion: 5 axis manual, X/Y: 25mm, Z: 5-30mm, T: -5° - +45°, R: 360° (continuous)
- Draw-out door: Max sample size: 150mm diameter
Size Type II
- Airlock: prepumped
- Max sample size 150mm diameter
- Stage motion: 5 axis manual, X/Y: 100mm/50mm, Z: 5 - 35mm, T: -5° - +60°, R: 360° (continuous)
Display System:
- Image display: Dual 12" monitors
- Scanning mode: normal, reduced area, line scan, photo scan, spot position, split screen
- Scanning speed: TV, 0.3, 2, 9, 25, 35, 100, 160, 320 s/frame
- Signal processing
- Real-time processing
- Auto-brightness and contrast control
- Dynamic stigmator sutofocus
- Frame averaging
- Frame integration
- Contrast conversion
Vacuum System:
- Full automatic operation with pneumatic valve control
- Ultimate vacuum: 10(-7) Pa in electron gun chamber, 10(-4) Pa in specimen chamber
- Ion pump: 60 L/s X1, 20 L/s X2
- Specimen chamber: DP (570 L/s)
- Foreline: Rotary pump X2
Accessories (Optional):
- EDX: at 30° take off angle
- Digital image capturing: Orion-6 software, optional
- Chilled water circulator: 10-20° C, 1.0-1.5 L/m for DP only
Installation:
- AC: Single phase AC 220 or 240 volt, 50/60 Hz
- Grounding: Independent grounding 100 Ohms or less
1993 Vintage