ASML Twinscan AT 850 B Wafer Stepper

Asset # : 75800
Equipment Make: ASML
Equipment Model: Twinscan AT 850 B
Type: Wafer Stepper
Wafer Size: 12"
Equipment Configuration: - Sub Proc : KrF
- Material : Align
- Operating System : UNIX
- SMIF/FOUP : YES
- S/W version : 5.0.0 C
- RH type : IRIS (PPD)
- WH type : SMIF type
- IL type : UNICOM
- Workstation type : Sun NETRA V240
- Laser type : Cymer Laser
- Proc Module Specificat
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  • Added: January 2, 2024

  • Views: 385

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