Lam 2300 V 2 KIYO 45 Etcher
Asset # :
74686
Equipment Make:
Lam
Equipment Model:
2300 V 2 KIYO 45
Type:
Etcher
Wafer Size:
Equipment Configuration:
- Chambers: KIYO 45 (2)
- Loadport: Brooks (3)
- Transfer Robot: Brooks
- Transfer Robot Arm: YES
- ATM Robot: YES
- Power: 208 Vac, 50/60 Hz, 272 Amps
- Loadport: Brooks (3)
- Transfer Robot: Brooks
- Transfer Robot Arm: YES
- ATM Robot: YES
- Power: 208 Vac, 50/60 Hz, 272 Amps
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Added: October 24, 2023
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Views: 458