Aixtron G 5 Plus MOCVD Sold
Asset # :
73739
Equipment Make:
Aixtron
Equipment Model:
G 5 Plus
Type:
MOCVD
Wafer Size:
6"
Equipment Configuration:
- GaN
- Possible to run (QTY: 5) 8" wafers
- Penta Injector
- EpiTT Version 1
- Single filter exhaust CT500
- TMGax2, TMAlx2, Cp2Mg
- H2, N2, Nh3,Cl2 (no mixer) that was external of the system
- Aixact version 7.1.2.8
- Ebara ESA80 process pump
- Two scr
- Possible to run (QTY: 5) 8" wafers
- Penta Injector
- EpiTT Version 1
- Single filter exhaust CT500
- TMGax2, TMAlx2, Cp2Mg
- H2, N2, Nh3,Cl2 (no mixer) that was external of the system
- Aixact version 7.1.2.8
- Ebara ESA80 process pump
- Two scr
Equipment Pictures:
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Added: November 8, 2023
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Views: 1051