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Hitachi S 8820 CD-SEM

Asset #: 71319

Make: Hitachi

Model: S 8820

Wafer Sizes: 6, 8 inch

Last Confirm Date: May 11, 2023

Hitachi S 8820 CD-SEM, 6", 8"
- Principle of CD measurement: Cursor and line profile measurement
- CD measurement range : 0.1 to 10μm
- Measurement Repeatability: ± 1% or 0.005 μ m (3 sigma) (threshold method), whichever larger
- Throughput: 26 wafers/hour (in continuous measurement), 1 point/chip, 5 chips/wafer
- Secondary electron image Resolution: 5 nm (50 A) (at accelerating voltage
of 0.8kV) (with reference specimen dedicated for resolution Measurement)
- Magnification: × 1000 to × 150,000(SEM image), About × 110(optical
microscope image)
- Option: modification to 6” or 4” GaAs wafer

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