Edwards E 306 A Coating System
Asset # :
69642
Equipment Make:
Edwards
Equipment Model:
E 306 A
Type:
Coating System
Wafer Size:
Equipment Configuration:
- With a CT-200 cryopump and an Oil based Edwards roughing pump
Features:
- 2ea rotating ’shields’ that keep deposition and heat off of the belljar
- A 4-pocket eGun and both a fixed shutter and a rotary shutter
- The stage contains tapped holes so one m
Features:
- 2ea rotating ’shields’ that keep deposition and heat off of the belljar
- A 4-pocket eGun and both a fixed shutter and a rotary shutter
- The stage contains tapped holes so one m
Equipment Pictures:
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Added: February 22, 2023
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Views: 412