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KLA-Tencor Surfscan SP 3 Particle Measurement
KLA-Tencor Surfscan SP 3 Particle Measurement
KLA-Tencor Surfscan SP 3 Particle Measurement
KLA-Tencor Surfscan SP 3 Particle Measurement
KLA-Tencor Surfscan SP 3 Particle Measurement

KLA-Tencor Surfscan SP 3 Particle Measurement

Asset #: 65019

Make: KLA-Tencor

Model: Surfscan SP 3

Last Confirm Date: April 20, 2022

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KLA-Tencor Surfscan SP 3 Particle Measurement
- IMC (image computer) 1 unit
- 1 heat exhaust blower unit
- Handling Options:
- Vacuum Chuck Triple FIMS handler (3 x 300 mm) 1 set
Software:
- NGS Version:6.20.6360
- IMC Version: 2.30.6360
Standard Options
- Oblique Incident 1 set
- ST mode 1 set
- 2mm edge exclusion area 1 set
- Defect classification function (Slipline, Scratch, Cluster, LPD-N, LPD-ES, RBB) 1 set
- Dual Scan (Normal + Oblique Scan) 1 set
- Partial Dual Scan (Secondly Inspection Region) 1 set
- SURFmonitor Essentials 1 set
- Optical filter (Fluorescence Filter) 1 set
- Spatial filters (20 degrees, 40 degrees, Back) 1 set
- Environmental optics (COE) kit 1 set
- Cool White Panels (exterior panel) 1 set
Options:
- Normal incident P/N: 0274498-000 1 set
- HT mode P/N: 0274501-000 1 set
- HS mode P/N: 0274499-000 1 set
- LPM (Large Particle Mode) P/N: 0262045-000 1 set
- Custom Film Generator (Auto Cal Film) P/N: 0395928-000 1 set
- 300mm silica wafer set P/N: 0302187-000 1 set
- 300mm XY coordinate standard wafer P/N: 0016628-000 1 set
- 300mm SP3 Haze Normalization Wafer Set P/N: 0356234-000 1 set 9
- NFS client P/N: 0306847-000 1 set
- NGS desktop software P/N: 0307637-000 1 set
- Installed Software Options
- Illumination Oblique
- Illumination Normal
- Throughput HS
- Throughput ST
- Throughput HT
- Desktop SW
- Haze Line Classification
- HighRes Haze
- Filters
- Grid Analysis
- Parameteric Correlation
- Grading
- Mask 20 Degrees
- Mask 40 Degrees
- iDM
- SurfACEQuality low k
- SurfACEQuality Rough 1
- SurfACEQuality Rough 2
- SurfACEQuality Smooth
- SurfACEQuality Very Smooth
- SurfACEQuality Medium
- Filter Flourescence
- Mask Back
- SURFImage in KLARF
- Dual Incidence
- Rule Based Binning
- Dual Incidence Obl Obl
- M53 Norm Style
- Enhanced LPD Detection
- DRE
- Mask XFS H3
- InstSub Type Classic Plus
- Large Particle Mode
- ART
- Custom Film Generator
- Sub1nm Edge Exclusion
- Enh User Security
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