KLA Tencor 2365 UV/Vis Ultra Broadband Brightfield Patterned Wafer Inspection System
Asset # :
60852
Equipment Make:
KLA-Tencor
Equipment Model:
2365
Type:
UV-VIS Ultra Broadband Brightfield Patterned Wafer Inspection System
Wafer Size:
8", 12"
Equipment Configuration:
– Electrical Input: 208 VAC 3 phase WYE nominal With Power Line Conditioner: 208, 240, 380, 416, or 480 VAC
– Wafer handling: Errors < 0.01% (1 in 10,000) of wafers inspected Damage < 0.001% (1 in 100,000) of wafers inspected
- Cleanliness: Fed Standard
Equipment Pictures:
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Added: July 28, 2021
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Views: 940