Veeco K 465 i MOCVD Reactor Sold
Asset # :
58280
Equipment Make:
Veeco
Equipment Model:
K 465 i
Type:
MOCVD Reactor
Wafer Size:
Equipment Configuration:
- GaN
- Materials Used: Silicon substrate sapphire substrate, GaN , AlN , dopant Si, Mg
- Software Version: PMflex (control software) ver. 04.04.01.00 & CTCFlex (UI, control software) V4.04.0.0
- Nexus Recipe Editor V4.04.0.0
- RT210 (in situ monitor)
- Materials Used: Silicon substrate sapphire substrate, GaN , AlN , dopant Si, Mg
- Software Version: PMflex (control software) ver. 04.04.01.00 & CTCFlex (UI, control software) V4.04.0.0
- Nexus Recipe Editor V4.04.0.0
- RT210 (in situ monitor)
Equipment Pictures:
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Added: January 20, 2021
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Views: 727