Evatec / Balzers BAK 1401 Evaporator Sold

Asset # : 58099
Equipment Make: Balzers / Evatec
Equipment Model: BAK 1401
Type: Evaporator
Wafer Size: 6"
Equipment Configuration:

– Right Hand Open System
– (QTY: 2) Six pocket E-Guns
– 2 sources
– Holds Approx 48 6″ wafers
– QCM and Coptical In-Situ thickness monitoring system
– Paramount 6013 6kW RF Gen
– Gases:  O2, HPN, Argon, N2, and one open
Pumping System:
– CTI Cryogenics on

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  • Added: December 23, 2020

  • Views: 1232

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