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Aixtron AIX 2800 G 4 HT GaN MOCVD
Aixtron AIX 2800 G 4 HT GaN MOCVD
Aixtron AIX 2800 G 4 HT GaN MOCVD
Aixtron AIX 2800 G 4 HT GaN MOCVD
Aixtron AIX 2800 G 4 HT GaN MOCVD
Aixtron AIX 2800 G 4 HT GaN MOCVD
Aixtron AIX 2800 G 4 HT GaN MOCVD
Aixtron AIX 2800 G 4 HT GaN MOCVD
Aixtron AIX 2800 G 4 HT GaN MOCVD
Aixtron AIX 2800 G 4 HT GaN MOCVD
Aixtron AIX 2800 G 4 HT GaN MOCVD
Aixtron AIX 2800 G 4 HT GaN MOCVD
Aixtron AIX 2800 G 4 HT GaN MOCVD
Aixtron AIX 2800 G 4 HT GaN MOCVD
Aixtron AIX 2800 G 4 HT GaN MOCVD
Aixtron AIX 2800 G 4 HT GaN MOCVD
Aixtron AIX 2800 G 4 HT GaN MOCVD

Aixtron AIX 2800 G 4 HT GaN MOCVD

Asset #: 56712

Make: Aixtron

Model: AIX 2800 G 4 HT

Last Confirm Date: July 08, 2020

Aixtron AIX 2800 G 4 HT GaN MOCVD
- Susceptor dimension: D520mm x T19mm
- Chamber coil (9 channels)
- Hydride Line: 1xNH3, 2xDopant
- Purifier: H2, N2, NH3
- Pump: DOR pump(SH-110), Ebara pump(ESA70)
With:
- H2 Purifier (IN LINE Type) Teratech TPH-LP-500S(100S) 
- Gas: Hydrogen 
- Process Methods: Line Purifire
- Flow Rate(Nm3/hr): 10.30.50.75.100.150.300
- Impurities Removed : H2 O2 H2O CO CO2
2010 Vintage

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