Aixtron AIX 2800 G 4 HT GaN MOCVD Sold
Asset # :
56712
Equipment Make:
Aixtron
Equipment Model:
AIX 2800 G 4 HT
Type:
GaN MOCVD
Wafer Size:
Equipment Configuration:
– Susceptor dimension: D520mm x T19mm
– Chamber coil (9 channels)
– Hydride Line: 1xNH3, 2xDopant
– Purifier: H2, N2, NH3
– Pump: DOR pump(SH-110), Ebara pump(ESA70)
With:
– H2 Purifier (IN LINE Type) Teratech TPH-LP-500S(100S)
– Gas: Hydrogen
– Process
Equipment Pictures:
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Added: October 9, 2020
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Views: 506