Lam Rainbow 4520 Oxide Etch Sold
Asset # :
55145
Equipment Make:
Lam
Equipment Model:
Rainbow 4520
Type:
Oxide Etcher
Wafer Size:
8"
Equipment Configuration:
- EnVision Software v 1.4.6
- Gas Supplies: He, O2, N2, Ar, CF4, CHF3
- Clamp Type
- Gas Supplies: He, O2, N2, Ar, CF4, CHF3
- Clamp Type
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Added: October 9, 2020
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Views: 1195