KLA-Tencor Candela CS 920 Optical Surface Analyzer, 3" to 8"
- Laser‐based inspection and surface metrology system for semiconductor and related optoelectronic materials
- Optical head with dual laser OSA technology and multi‐channel detector design for optimal inspection both opaque and transparent materials
- The Candela CS920 is fully automated with cassette‐to‐cassette wafer handling
- Robotic wafer handler for 3" to 200mm diameter wafers
- Application Software:
- System is equipped with hardware and software required for imaging and data analysis with automatic defect detection and classification
- Robotic wafer handler for 3" to 200mm diameter wafers
- Flat Panel monitor.
- Workstation with Windows Server 2008 operating System.
- ULPA filtration system mounted over the scan area providing controlled sample environment.
- Provides internal Class 10 cleanroom environment.
- Standard 150 mm(6”) configuration:
- SiC sub, SiC epi
- Comes with 6" Ring Chuck and Transfer Ring. Wafer handler for 3" to 200mm diameter wafers.
- Optical head with dual laser OSA technology and multi‐channel detector design for optimal inspection both opaque and transparent materials.
- GEM/SECS HSMS
- Windows Server 2008 R2 Standard. Panel monitor; Workstation with Windows Server 2008 operating System
- 6” Ring Chuck
- 6” Transfer Ring
- 208VAC,50/60Hz,8720,USA
- Adjustable UI
- Photoluminescence
- Wafer ID OCR 8XP-Backside:
- OCR is a hardware feature designed to read wafer ID lasers scribe at the pre‐aligner station during wafer flat alignment
- Wafer ID is automatically populated in the SW slot # for the run sequence
- OCR equipped to read wafer ID laser scribe on the backside only. (Requires purchase of HW wafer flat pre‐aligner)
- Light Tower Option:
- The Light Tower has 7 drivers and software to drive 5 lights (R/Y/G/B/W) and 2 buzzers (or any combination of lights and buzzers.)
- User can choose any combination that sequence up to 5 colors RYGBW.
2016 Vintage