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KLA-Tencor SP 1 TBI Inspection System
KLA-Tencor SP 1 TBI Inspection System
KLA-Tencor SP 1 TBI Inspection System
KLA-Tencor SP 1 TBI Inspection System
KLA-Tencor SP 1 TBI Inspection System
KLA-Tencor SP 1 TBI Inspection System
KLA-Tencor SP 1 TBI Inspection System
KLA-Tencor SP 1 TBI Inspection System
KLA-Tencor SP 1 TBI Inspection System
KLA-Tencor SP 1 TBI Inspection System
KLA-Tencor SP 1 TBI Inspection System
KLA-Tencor SP 1 TBI Inspection System
KLA-Tencor SP 1 TBI Inspection System
KLA-Tencor SP 1 TBI Inspection System
KLA-Tencor SP 1 TBI Inspection System
KLA-Tencor SP 1 TBI Inspection System
KLA-Tencor SP 1 TBI Inspection System
KLA-Tencor SP 1 TBI Inspection System
KLA-Tencor SP 1 TBI Inspection System
KLA-Tencor SP 1 TBI Inspection System
KLA-Tencor SP 1 TBI Inspection System
KLA-Tencor SP 1 TBI Inspection System
KLA-Tencor SP 1 TBI Inspection System
KLA-Tencor SP 1 TBI Inspection System

KLA-Tencor SP 1 TBI Inspection System

Asset #: 70009

Make: KLA-Tencor

Model: SP 1 TBI

Last Confirm Date: March 13, 2023

KLA-Tencor SP 1 TBI Inspection System
- Windows NT, RAM 523700 KB
- SP1 SW version 3.50.2304
- Oblique Option, XY Enhancement
- 488 nm 30mW Argon – Ion Laser wavelength
- Optics configuration: DWO,DNO,DWN,DNN
- Note: DWO: Dark field Wide channel Oblique path, DNO: Dark field Narrow channel Oblique path / DWN:Dark field Wide channel Normal path, DNO : Dark field Narrow channel Normal path
- Max sensitivity: 0.060um on DWO (oblique? HS, 0.083am on DWN (normal/HS) (KT OEM specification)
- Note : 0.102um on DWO / DNO / DWN / DNN (HS mode) for used tool
- Support 8 & 12’’ chuck and scan stage
- 1x 300mm FOUP
- Single puck handling system with mapping function
- OS & Application software: Windows NT4.0 & MX4.0
- GEM/SECS (HSMS)function
- TFT Flat panel display
- Defect map and histogram with zoom
- Micro view measurement capability
- Cassette locator with mapping function
- Support wafer thickness: 625~775 um
- X-Y coordinates function
- Blower unit 1.16
- Dual HDD System (Master HDD for use , Slave HDD is for backup)
2001 Vintage

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