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Karl Suss ACS 200 Coater / Developer
Karl Suss ACS 200 Coater / Developer
Karl Suss ACS 200 Coater / Developer
Karl Suss ACS 200 Coater / Developer
Karl Suss ACS 200 Coater / Developer
Karl Suss ACS 200 Coater / Developer
Karl Suss ACS 200 Coater / Developer
Karl Suss ACS 200 Coater / Developer
Karl Suss ACS 200 Coater / Developer
Karl Suss ACS 200 Coater / Developer
Karl Suss ACS 200 Coater / Developer
Karl Suss ACS 200 Coater / Developer
Karl Suss ACS 200 Coater / Developer

Karl Suss ACS 200 Coater / Developer

Asset #: 68658

Make: Karl Suss

Model: ACS 200

Wafer Sizes: 4 inch

Last Confirm Date: January 20, 2023

Karl Suss ACS 200 Coater / Developer, 4"
- 4 hot/chill plates
- Spinner module ACS 200
- The system is using 3x Cybor 5126 pump and filtration systems controlled by a Cybor 512 Control Module (Cyborpump 5000 series system)
- HCV Module 200MS233 Filler Module 250AA
- Aqueous Developer Module 200AA149
- SUSS 200AA129

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