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Lam Alliance 6 9400 DFM-P Etcher

Asset #: 89

Make: Lam

Model: Alliance 6 9400 DFM-P

Wafer Sizes: 8 inch

Last Confirm Date: February 02, 2016

Lam Alliance 6 9400 DFM-P Etcher, 8"
A. Robot
- Brooks Mag 7 2 Blade Robot
B. Load lock
- Load Lock Type: Auto Door
- VCE Elevator: Bellows
- Mapping Sensor Include
- Cassette Type: 25slot Cassette
- VCE Gate Valve
- VCE vacuum isolation valves
- TM vacuum isolation valves
- TM pneumatic valves
C. TM LID
- Pneumatic Cylinder Lift
- Up/Down/Actuate Swith
D. Transport system control
- Transport VME
- MultiPlexer PCB
- Light Tower PCB
E. Chamber information
1. Position 1 - Empty
2. Position 2 - 9400DFM-P (Trench)
3. Position 3 - 9400DFM-P (Trench)
4. Position 4 - Empty
5. Aux Position - Empty
6. Aux Position - Empty
F. Miscellaneous
- Wafer Present Sensors (WPS)
- TM & VCE Pump Option: Single pump type
- Fab Clean Room Config: Bulkhead
2000 Vintage Vintage

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