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Varian E 500 HP Ion Implanter
Varian E 500 HP Ion Implanter
Varian E 500 HP Ion Implanter
Varian E 500 HP Ion Implanter
Varian E 500 HP Ion Implanter
Varian E 500 HP Ion Implanter
Varian E 500 HP Ion Implanter
Varian E 500 HP Ion Implanter
Varian E 500 HP Ion Implanter
Varian E 500 HP Ion Implanter
Varian E 500 HP Ion Implanter
Varian E 500 HP Ion Implanter
Varian E 500 HP Ion Implanter
Varian E 500 HP Ion Implanter
Varian E 500 HP Ion Implanter
Varian E 500 HP Ion Implanter
Varian E 500 HP Ion Implanter
Varian E 500 HP Ion Implanter
Varian E 500 HP Ion Implanter
Varian E 500 HP Ion Implanter

Varian E 500 HP Ion Implanter

Asset #: 83838

Make: Varian

Model: E 500 HP

Wafer Sizes: 6 inch

Last Confirm Date: October 04, 2024

Varian E 500 HP Ion Implanter, 6"
- Signal Tower: Front (Red, yellow, green)
- Production Wafer Qty': 1 wafer (single platen)
- Platen Type: Mechanical Clamp
- Loadlock: Left/Right 2 Chambers
- Software version: 12.10.21
- Implant Monitor LCD: Touch screen
- Service Monitor LCD: Touch screen
System Vacuum:
- Ion Source Chamber: CCIG/Torr
- Beamline Chamber: CCIG/Torr
- End Station Chamber: CCIG/Torr
Pumps
- Source Dry Pump: iQDP 80
- Stage Pump: iQDP 80+QMB 500
- Load lock Rough Pump: iQDP 80
- Load lock Turbo Pump: CTI 100
- Process Chamber: CT-10
- Source Turbo Pump: Leybold MAG W 1300 C
- Resolaper Turbo Pump: Pfeiffer HiPace 300
- Beamline Turbo Pump: Pfeiffer TMH 521 YP
Issues:
- Some of the power cables for the internal lights perished due to age
- Terminal doors sagging with age
1996 Vintage

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