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Novellus / Lam Concept Two Speed NExT CVD
Novellus / Lam Concept Two Speed NExT CVD
Novellus / Lam Concept Two Speed NExT CVD
Novellus / Lam Concept Two Speed NExT CVD
Novellus / Lam Concept Two Speed NExT CVD
Novellus / Lam Concept Two Speed NExT CVD
Novellus / Lam Concept Two Speed NExT CVD
Novellus / Lam Concept Two Speed NExT CVD
Novellus / Lam Concept Two Speed NExT CVD
Novellus / Lam Concept Two Speed NExT CVD
Novellus / Lam Concept Two Speed NExT CVD
Novellus / Lam Concept Two Speed NExT CVD
Novellus / Lam Concept Two Speed NExT CVD
Novellus / Lam Concept Two Speed NExT CVD
Novellus / Lam Concept Two Speed NExT CVD
Novellus / Lam Concept Two Speed NExT CVD
Novellus / Lam Concept Two Speed NExT CVD
Novellus / Lam Concept Two Speed NExT CVD

Novellus / Lam Concept Two Speed NExT CVD

Asset #: 83055

Make: Novellus / Lam

Model: Concept Two Speed NExT

Wafer Sizes: 8 inch

Last Confirm Date: August 28, 2024

Novellus / Lam Concept Two Speed NExT CVD, 8"
- Wafer Shape: Notch
- SMIF Interface: Yes
- Cassette Loader: LPI 2200
- Loadlock Indexer Robot: Indexer II
- PEC slot: MPS with one cool station
- Main power distributer: PDP
- System Main Power: 3¢5Wires 208V
- System UPS Power: Yes
- Loadlock Baratron Model: MKS
- Split Insert: Yes
- Slit Valve Type: SMC L-Motion
- TM Turbo Pump Model: Pfeiffer TC 400 E74
- TM Throttle Valve Model: MKS
- TM Baratron Model: MKS
- IOC Version: V 4.4
- TM Robot Type: Mag 7 with Center Finder
- TMRobot Blade: Metal
- Wafer sensor: Existence
- EMO's: Push Button/turn to release
- Front Monitor: 15 inch
- Software Revision: 5.502 B26
- Signal Tower: Yes
- Module Controller: MC4X
- Host Interface: SECS / GEM
DLCM Gas MFC:
- MFC1 Ar/He: 1000sccm Ar / Brooks 5866
- MFC2 Ar/He: 1000sccm Ar / Brooks 5866
- MFC3 Ar/He: 500sccm Ar / Brooks GF120C
Process Module configuration:
- Chamber Type Nanofill
- Chamber Process IMD + Multistep
- Process Clean Type RPC
- Dome Type High Power Dome with Multi Frequency
- ESC Type: Duratek mc Notch 6 Pin
- Nanofill:High Purity ESC Guard Ring: Notch
- Module Controller: MC4X
- Module Turbo Pump: Adixen ATP 2300M
- Manometer 1(10T): MKS
- Throttle Valve: MKS
- Temp Monitoring: NTM Delta with ATC: ATC option
- Manometer 2(20T): MKS
- HF Generator: AE Paramount 6013
- MF Generator: AE Paramount 5KW
- LF Generator: AE Paramount 5KW
- RF Match: AE MERCURY 3013
- Manometer 3(100m): MKS
- IOC Version: V 4.21
- End Point Detector: OES EPD: Verity SD2048XL-T
Heat Exchanger Type: SMC
Dual Clean Injector Kit: RPC with one nozzle
2022 Vintage

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