Skip to content
Skip to product content

Matrix 10 X Asher / Etcher

Asset #: 82757

Make: Matrix

Model: 10 X

Wafer Sizes: 4, 5, 6 inch

Last Confirm Date: August 16, 2024

Matrix 10 X Asher / Etcher, 4" to 6"
Plasma Power:
-RF 100-500 W Auto-tune
- 600 Watts maximum
- 13.56 MHz
Wafer:
- Round
< 4.5" square substrates
Cassette Platform:
- Adjustable
Closed Loop Pressure Control:
- Tylan Butterfly Valve
- Capacitance Manometer
Latest Software Version / Overhead Time"
- 4.02 / 45 sec
Temperature Control of Wafer Chuck:
- Closed Loop
- Resistive
- Element Heated
- Deep Grooved Chuck
- Range: 100°C - 220°C (+5°C)
Plasma Chamber / Electrode Design:
- Showerhead / Interleaved Wide Ground Electrode
Baffle Design:
- Dual Quartz - Fixed
Baseplate Cooling
No Wafer Cooling Station
Process:
- Throughput; >25 WPH
- Process Gases: 02 & N2 Standard (3rd MFC optional)
Strip Rate (6" wafers, 1.2 μ 120°C baked resist):
>0.8 μ/min @ 220°C
Non-uniformity, 1 sigma:
- < 10%
Particulates added/ size:
- <0.10 / cm2 > 0.3mm
Min Vacuum Pump speed:
- 26 CFM
Reliability:
- Availability: > 90%
- MTBF: > 250 hours
- MTBA: > 24 hours
- MTTR: < 6 hours

Recommended Products


Equipment Sourcing:

Unmatched Expertise in Global Procurement

See More of Our Equipment

At Bridge Tronic Global, we leverage our extensive network and industry expertise to source high-quality semiconductor manufacturing equipment from trusted suppliers worldwide. Whether you're looking for cutting-edge technology or reliable pre-owned equipment, our sourcing capabilities ensure that you receive the best options tailored to your needs.

We understand that every client's requirements are unique, so we prioritize transparency, thorough vetting, and a deep understanding of the global market to secure the right equipment for your operations. Our team is dedicated to delivering timely, cost-effective solutions without compromising on quality or performance.


Wafer test machine

Refurbishment: Restoring Excellence, Maximizing Value

At Bridge Tronic Global, our refurbishment services breathe new life into used semiconductor manufacturing equipment, ensuring peak performance at a fraction of the cost. Our expert technicians meticulously restore equipment from leading brands like KLA and Hitachi, applying rigorous testing and quality control measures. Whether you need a single piece refurbished or a fleet of equipment overhauled, we deliver reliable, high-performing solutions that extend the lifespan of your assets while optimizing your budget.

Cart

Your cart is currently empty