Yes PB 12 Vacuum Curing System
- Capacity is two 25 wafer cassettes in a batch process (50 wafers at a time) - 300mm FOUP
- Uses wafer cassette (manually bring wafer to the machine, then load wafers inside)
- Chamber Material: 316L Stainless Steel
- Operation Temperature: ambient to 450°C (option high temp version: Ambient to 550°()
- Process Gas Inputs: 1 standard up to 3 optional
- Preheated N, (Process Gas)
- Includes full-dimension 100-micron inlet for preheated laminar nitrogen purge
- Dual door 0-Rings with nitrogen purge between the seals, eliminates oxygen leakage through door seal
- Mass Flow Controllers: optional, up to 3
- Laminar Flow Filter: 100 micron Mott'" plate filter
- Cleanliness: particle reduction in most applications
- Manual Throttle Valve assembly
- Air-cooled chamber with external forced air convection
- Alternate vacuum valve for process vacuum
- Vacuum plumbing with VCR
- Swagelok 1" lines and valves
- Shut-off switch located below door to shut off heaters if door is opened
- Dual Condensate Filter Assembly
Controller Assembly
- Color Touch Screen Operator Interface
- Number of Recipes: 8 temperature profiles (up to 200 with YES - DAQ-LR option)
- PLC controller
- RS-232 Interface for Controller to download/monitor programs
- Ambient to 450°C with LED temperature and set point displays
- Multiple temperature dependent PID setting in temperature controller
- Operation Temperature: Ambient to 450° C with LED temperature readout and ramp-up/down capability
- Audible "Cycle Complete" Indicator
- Digital Granville-Phillips'" double set point vacuum gauge
- High and Low pressure nitrogen checkpoint
- Overtemp protection shut-off
- Visual cycle complete
- Light Tower with 11 abort, 11 11 cyde compete" and 11 running 11 lights with audible alarm
- EMO (front and rear)
System Specifications
- 208V, 3 Phase 50/60 Hz, 40 amps
- Average heat-up rate 3.5* C/min (from 150' C - 450' C)
- Average cool down rate 3,0' C/min (from 450' C - 150' C)
- Temperature uniformity+/- 5,0' Cat dwell* after all temperature points have stabilized for 15 minutes (empty chamber at pressures above 50 TORR)
- Oxygen Concentration: 10 ppm over background
- Cassette Guide
- 02 Analyzer with RS-485 Communication dry (scroll) pump required for this option
- Filter Replacement Kit - 02 Analyzer
- YES-DAQ-LR - Recipe Management with SECS/GEM Interface
- Real time data collection of all process control data