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Hitachi S 9360 CD-SEM
Hitachi S 9360 CD-SEM
Hitachi S 9360 CD-SEM
Hitachi S 9360 CD-SEM
Hitachi S 9360 CD-SEM
Hitachi S 9360 CD-SEM
Hitachi S 9360 CD-SEM
Hitachi S 9360 CD-SEM
Hitachi S 9360 CD-SEM

Hitachi S 9360 CD-SEM

Asset #: 67216

Make: Hitachi

Model: S 9360

Last Confirm Date: September 06, 2022

Hitachi S 9360 CD-SEM
- Lower Vacuum System working properly
- Main Laser Source and 5-Phase drivers are dead
- The main software startup monitor stops and could not complete the reboot
- Both AV-1 valve and the objective aperture assemblies are broken, but still not leaking
- The Brooks Loadport is not working
- The pre-aligner is not working
- Tazmo robot is working in manual mode as standalone unit
- Main workstation Hitachi CDSEM software not working

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