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Hitachi S 8840 CD-SEM
Hitachi S 8840 CD-SEM
Hitachi S 8840 CD-SEM
Hitachi S 8840 CD-SEM
Hitachi S 8840 CD-SEM
Hitachi S 8840 CD-SEM
Hitachi S 8840 CD-SEM
Hitachi S 8840 CD-SEM
Hitachi S 8840 CD-SEM
Hitachi S 8840 CD-SEM
Hitachi S 8840 CD-SEM

Hitachi S 8840 CD-SEM

Asset #: 53900

Make: Hitachi

Model: S 8840

Wafer Sizes: 6 inch

Last Confirm Date: January 14, 2020

Hitachi S 8840 CD-SEM, 6"
- Robot make/model: MECS UTC 100 A
- Software version: 15.10
- HP computer: B 180 L
- CE mark certified
- 208 V
- LoadLock Turbo: Leybold Turbovac 50
- LoadLock Turbo controller: Leybold Turbotronik NT 10
- Process Chamber Turbo: Leybold Turbovac 340 M
- Process Chamber controller: Leybold Turbotronik NT 340 M
- GEM / SECS Interface
- Cables and covers
- Isolation transformer
- Vacuum hose (4)
1999 Vintage

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