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Plasmatherm Versaline VLN ICP Etcher
Plasmatherm Versaline VLN ICP Etcher
Plasmatherm Versaline VLN ICP Etcher
Plasmatherm Versaline VLN ICP Etcher
Plasmatherm Versaline VLN ICP Etcher
Plasmatherm Versaline VLN ICP Etcher
Plasmatherm Versaline VLN ICP Etcher
Plasmatherm Versaline VLN ICP Etcher
Plasmatherm Versaline VLN ICP Etcher

Plasmatherm Versaline VLN ICP Etcher

Asset #: 131374

Make: Plasmatherm

Model: Versaline VLN

Last Confirm Date: April 07, 2025

Plasmatherm Versaline VLN ICP Etcher
- Manual Load Lock for Single or Multiple Wafers
- Single ICP Chamber
- ENI ACG-6B RF Power Supply – 600W @ 13.56MHz with Seren AT6NVL Matchwork & MC2 Tunner
- ENI GMW-25A RF Power Supply – 2500W @2.0MHz with Seren AT25NVL Matchwork & MC2 Tunner
- VAT PM5 Pressure Controller with Leybold Turbo pump
- Seiko Seiki 1303CV Turbo Pump with Seiko Seiki SCU 750 controller
- VAT Gate Valve and controller
(5) MFCs-gas with Isolation, Process and By-pass valves
- He Backside Cooling
- Watlow chamber heater and controller
- Windows Based OS
- 208V, 60 Hz, 3 phase
- No pumps or chiller included
2011 Vintage

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