Skip to content
English English Chinese Chinese (Traditional) French French German German Japanese Japanese Korean Korean
Skip to product content

KLA-Tencor Surfscan SP 2 Unpatterned Surface Inspection System

Asset #: 130771

Make: KLA-Tencor

Model: Surfscan SP 2

Wafer Sizes: 12 inch

Last Confirm Date: March 26, 2025

Inquire
KLA-Tencor Surfscan SP 2 Unpatterned Surface Inspection System, 12"
- Main body: including stage, laser, optic system, sensor
- Handler: including robot, arm, loadport, controller
- UI: including monitor, trackball, keyboard
- Blower
- Load / Unload: Automatic
- Illumination: Oblique/Normal
- Channel: Narrow/Wide
Scan mode:
- Oblique/Wide: 37nm HS/42nm ST/47nm HT
- Oblique/Narrow: 60nm HS/70nm ST/80nm HT
- Normal/Wide: 61nm HS/68nm ST/72nm HT
- Normal/Narrow: 78nm HS/83nm ST/93nm HT
Uniformity:
- For Calibrated PSL size <50nm ± 1nm
- For Calibrated PSL size 50nm ≤size <200nm ±2%
- For Calibrated PSL 200nm ≤size ≤260nm ±5%
- For Calibrated PSL size >260nm ±7%
Repeatability:
- Count: CV* ≤ 1%, for mean count > 5000
- *CV = coefficient of variance, σ/µ
- Contamination: ≤0.001 particles (≥0.1 µm)/cm 2 /pass frontside
- Temperature: 20~24*C
- Humidity: 26~95% non-condensing
- Clean room: Class 10 or better
- Electrical Power: 200VAC-240VAC, 50/60Hz,
- Single phase, three wire, 30Amps RMS
Vacuum:
- 510~762mm Hg; 1 cfm (28.3LPM)
- 510mm Hg; 0.2 cfm (5.7LPM)
- (flexible 1/8” ID, ¼” OD vacuum hose)

Recommended Products

Equipment Sourcing:

Unmatched Expertise in Global Procurement

See More of Our Equipment

At Bridge Tronic Global, we leverage our extensive network and industry expertise to source high-quality semiconductor manufacturing equipment from trusted suppliers worldwide. Whether you're looking for cutting-edge technology or reliable pre-owned equipment, our sourcing capabilities ensure that you receive the best options tailored to your needs.

We understand that every client's requirements are unique, so we prioritize transparency, thorough vetting, and a deep understanding of the global market to secure the right equipment for your operations. Our team is dedicated to delivering timely, cost-effective solutions without compromising on quality or performance.

Wafer test machine

Refurbishment: Restoring Excellence, Maximizing Value

At Bridge Tronic Global, our refurbishment services breathe new life into used semiconductor manufacturing equipment, ensuring peak performance at a fraction of the cost. Our expert technicians meticulously restore equipment from leading brands like KLA and Hitachi, applying rigorous testing and quality control measures. Whether you need a single piece refurbished or a fleet of equipment overhauled, we deliver reliable, high-performing solutions that extend the lifespan of your assets while optimizing your budget.

Learn More
Cleanroom hallway
Cleanroom image

Ready to elevate your semiconductor manufacturing operations?

Contact Bridge Tronic Global today to explore customized solutions that meet your equipment needs. Whether you’re looking for high-quality refurbished equipment, sourcing expertise, or innovative technology, we’re here to help you stay ahead in this fast-paced industry. Let us be your trusted partner in driving efficiency and growth.

Reach Out Now

Cart

Your cart is currently empty