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Axcelis / Eaton NV GSD 200 E 2 Ion Implanter
Axcelis / Eaton NV GSD 200 E 2 Ion Implanter
Axcelis / Eaton NV GSD 200 E 2 Ion Implanter
Axcelis / Eaton NV GSD 200 E 2 Ion Implanter
Axcelis / Eaton NV GSD 200 E 2 Ion Implanter
Axcelis / Eaton NV GSD 200 E 2 Ion Implanter
Axcelis / Eaton NV GSD 200 E 2 Ion Implanter
Axcelis / Eaton NV GSD 200 E 2 Ion Implanter
Axcelis / Eaton NV GSD 200 E 2 Ion Implanter
Axcelis / Eaton NV GSD 200 E 2 Ion Implanter
Axcelis / Eaton NV GSD 200 E 2 Ion Implanter
Axcelis / Eaton NV GSD 200 E 2 Ion Implanter
Axcelis / Eaton NV GSD 200 E 2 Ion Implanter
Axcelis / Eaton NV GSD 200 E 2 Ion Implanter
Axcelis / Eaton NV GSD 200 E 2 Ion Implanter
Axcelis / Eaton NV GSD 200 E 2 Ion Implanter
Axcelis / Eaton NV GSD 200 E 2 Ion Implanter
Axcelis / Eaton NV GSD 200 E 2 Ion Implanter
Axcelis / Eaton NV GSD 200 E 2 Ion Implanter
Axcelis / Eaton NV GSD 200 E 2 Ion Implanter

Axcelis / Eaton NV GSD 200 E 2 Ion Implanter

Asset #: 130675

Make: Axcelis / Eaton

Model: NV GSD 200 E 2

Wafer Sizes: 8 inch

Last Confirm Date: March 25, 2025

Axcelis / Eaton NV GSD 200 E 2 Ion Implanter, 8"
- Cryo-Pumps: CTI/Edwards Onboard; OB-8 + OB-10 fully refurbished
- Cryo-Kompressor: CTI 9650 Low-Voltage
- Turbo-Pumps: Seiko STP A 2203 fully refurbished
- Terminal-Rough-Pump: without (Edwards IGX Config)
- End station Rough-Pump: without (Edwards IGX Config) bottom remote external
- Gas box: 5-String, 4x 2L Low-Pressure
- String 1: Low-Pressure Type VCR 1/4"; MFC MKS-1640A; 5sccm-AsH3
- String 2: BF3 SDS-Low-Pressure Type VCR 1/4"; MFC MKS-1640A; 5sccm-AsH3; PN:10010380
- String 3: Ash3 SDS-Low-Pressure Type VCR 1/4"; MFC MKS-1640A; 5sccm-AsH3; PN:10010380
- String 4: Ph3 SDS-Low-Pressure Type VCR 1/4"; MFC MKS-1640A; 5sccm-AsH3; PN:10010380
- String 5: Argon Carriergas; MFC Brooks GF120 10sccm-N2
- Disk-Drive: Direct-Drive
- Dose-Type: Regular
- Source-Type: ELS4 IHC-Source without Vaporizer
- High voltage-Transformer: Oil
- Light-Tower: red/yellow/green; no buzzer
- Main-Workstation: SUN Solaris AXI 3HE (special case)
- Software-Version: 6.13.5.1 (no license included)
- Network: 24 port 100MB Ethernet with Cisco Router-Kit
- Cell-Controller: V6 Type
- Mmodified Plasma-Gun Power-Supply installed (TDK)
- Minor modifications on tool
- No Manual-Set/ no Spares
2000 Vintage

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