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Axcelis NV GSD 200 E 2 Ion Implanter
Axcelis NV GSD 200 E 2 Ion Implanter
Axcelis NV GSD 200 E 2 Ion Implanter
Axcelis NV GSD 200 E 2 Ion Implanter
Axcelis NV GSD 200 E 2 Ion Implanter
Axcelis NV GSD 200 E 2 Ion Implanter
Axcelis NV GSD 200 E 2 Ion Implanter
Axcelis NV GSD 200 E 2 Ion Implanter
Axcelis NV GSD 200 E 2 Ion Implanter
Axcelis NV GSD 200 E 2 Ion Implanter
Axcelis NV GSD 200 E 2 Ion Implanter
Axcelis NV GSD 200 E 2 Ion Implanter
Axcelis NV GSD 200 E 2 Ion Implanter
Axcelis NV GSD 200 E 2 Ion Implanter
Axcelis NV GSD 200 E 2 Ion Implanter
Axcelis NV GSD 200 E 2 Ion Implanter
Axcelis NV GSD 200 E 2 Ion Implanter
Axcelis NV GSD 200 E 2 Ion Implanter

Axcelis NV GSD 200 E 2 Ion Implanter

Asset #: 130669

Make: Axcelis

Model: NV GSD 200 E 2

Wafer Sizes: 8 inch

Last Confirm Date: March 25, 2025

Axcelis NV GSD 200 E 2 Ion Implanter, 8"
- Energy Config: 0 - 160Kv High current
- CE-Conformity: Yes
- Voltage: 208V
- Cryo-Pumps: CTI/Edwards Onboard: OB-8 + OB-10
- Cryo-Kompressor: CTI 9650 Low-Voltage
- Source-Turbo-Pump: Seiko/Edwards STPA2203C
- Beamline-Turbo Pump: Oerlikon MAG W 1300 C
- Terminal-Rough-Pump: without (Edwards IGX Config)
- Endstation Rough-Pump: without (Edwards IGX Config)
- Wafersize: 200mm
- Disk-Type: Si-coated Disk
- Wafer-Cooling: no Disk-Chiller included !
- Gasbox: 5-String, 4x 2L Size
- String1: KrH2 High Pressure Type VCR 1/4"; MFC Brooks GF120 10sccm-N2
- String2: BF3 SDS-Low Pressure Type VCR 1/4"; MFC MKS-1640A; 5sccm-AsH3
- String3: AsH3 SDS-Low Pressure Type VCR 1/2"; MFC MKS-1640A; 5sccm-AsH3
- String4: PH3 SDS-Low Pressure Type VCR 1/2"; MFC MKS-1640A;
- String5: Argon Carriergas; MFC Brooks GF120 10sccm-N2
- Disk-Drive: Direct-Drive
- Dose-Type: Power-Dose
- Source-Type: ELS4 IHC-Source without Vaporizer
- High voltage-Transformer Source: Oil
- High voltage-Transformer Terminal: Oil
- Light-Tower: red/yellow/green; no buzzer
- Main-Workstation SUN Solaris SX1500 4HE
- Remote-Workstation SUN Solaris Axi 3HE (special case)
- Software-Version: 8.2.1 (no license included)
- Network: 24 port 100MB Ethernet with Cisco Router-Kit
- Cell-Controller: V6 Type
- Clean-Room Table on frontside missing
- Disk-Chiller not included
- Rough-Pumps not included
- Minor modifications on tool like Interlock Type
- No Manual-Set/ no Spares included
2011 Vintage

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