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Applied Materials Centura 5200 PECVD-W
Applied Materials Centura 5200 PECVD-W
Applied Materials Centura 5200 PECVD-W
Applied Materials Centura 5200 PECVD-W
Applied Materials Centura 5200 PECVD-W
Applied Materials Centura 5200 PECVD-W
Applied Materials Centura 5200 PECVD-W
Applied Materials Centura 5200 PECVD-W
Applied Materials Centura 5200 PECVD-W
Applied Materials Centura 5200 PECVD-W
Applied Materials Centura 5200 PECVD-W
Applied Materials Centura 5200 PECVD-W
Applied Materials Centura 5200 PECVD-W
Applied Materials Centura 5200 PECVD-W

Applied Materials Centura 5200 PECVD-W

Asset #: 130450

Make: Applied Materials

Model: Centura 5200

Wafer Sizes: 8 inch

Last Confirm Date: March 20, 2025

Applied Materials Centura 5200 PECVD-W, 8"
- Light Tower: Four Color Tower
- Loadlock Type: Narrow Body - Auto Tiltout
- Buffer Robot: Single Blade HP+
- Gas Panel Type: Seriplex
- Ebara A 10 W Buffer Chamber Pump
Chamber A & B:
- Ebara A 70 W WXZ Backing Pump
- Ebara A 10 W Loadlocks Backing Pump
- Chamber Process Type: WxZ
- Chamber Clean Process: RF Plasma
- Backside Pressure Control: MKS 1170 Argon 2SLM
- Lid Assembly: Enhanced Cooled Lid
- Heater Type: AL W/Ceramic Purge Ring

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