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Applied Materials Centura Ultima + HDP-CVD
Applied Materials Centura Ultima + HDP-CVD
Applied Materials Centura Ultima + HDP-CVD
Applied Materials Centura Ultima + HDP-CVD
Applied Materials Centura Ultima + HDP-CVD
Applied Materials Centura Ultima + HDP-CVD
Applied Materials Centura Ultima + HDP-CVD
Applied Materials Centura Ultima + HDP-CVD
Applied Materials Centura Ultima + HDP-CVD
Applied Materials Centura Ultima + HDP-CVD
Applied Materials Centura Ultima + HDP-CVD
Applied Materials Centura Ultima + HDP-CVD
Applied Materials Centura Ultima + HDP-CVD
Applied Materials Centura Ultima + HDP-CVD
Applied Materials Centura Ultima + HDP-CVD
Applied Materials Centura Ultima + HDP-CVD
Applied Materials Centura Ultima + HDP-CVD
Applied Materials Centura Ultima + HDP-CVD
Applied Materials Centura Ultima + HDP-CVD
Applied Materials Centura Ultima + HDP-CVD
Applied Materials Centura Ultima + HDP-CVD
Applied Materials Centura Ultima + HDP-CVD
Applied Materials Centura Ultima + HDP-CVD
Applied Materials Centura Ultima + HDP-CVD
Applied Materials Centura Ultima + HDP-CVD
Applied Materials Centura Ultima + HDP-CVD
Applied Materials Centura Ultima + HDP-CVD

Applied Materials Centura Ultima + HDP-CVD

Asset #: 130351

Make: Applied Materials

Model: Centura Ultima +

Wafer Sizes: 8 inch

Last Confirm Date: March 18, 2025

Applied Materials Centura Ultima + HDP-CVD, 8"
- Refurbished (2010)
- Through-the-wall Software Version B5216
- CE Mark Certified
- All Cables Present
Chamber Process
- Position A Ultima+ HDPCVD
- Position B Ultima+ HDPCVD
- Position E Multi-slot cool 
- Position F Orienter 
- Loadlock Type NB w/Tilt Out    
- Wafer Slide Sensor No
- Bolt-On-SMIF No
- Robot Type HP    
- Blade Type Ceramic 
- Transfer Lid Hoist
- Wafer on Blade Sensor OTF SBC Version V452
- Remote Service Monitors
- GEMS
- Gate Valve VTEX
- Turbo Pump Ebara ET 1600 WS
- Dual Independent Helium Control 10/10 TORR (std)
- Clean Method Top Mount (RPS)
- Upper Chamber P/N 0010-18259
Chamber Position
- Position A - Top ENI NOVA-50
- Position A - Side ENI NOVA-50
- Position A - Bias Trumpf TruPlasma 3000G2
- Position B - Top ENI NOVA-50
- Position B - Side ENI NOVA-50
- Position B - Bias ENI GHW-50
- Gas Delivery Type: MLD
- Gas Panel Interface Type: Configurable
- Gas Panel Exhaust Bottom / Left Box 16
- Gas 1 He 2 N2 3 N2 4 Ar 5 O2 6 NF3 7 NF3 8 SiH4 9 SiH4
2001 Vintage

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