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Lam TCP 9400 DSiE G Poly Etcher

Asset #: 128623

Make: Lam

Model: TCP 9400 DSiE G

Wafer Sizes: 8 inch

Last Confirm Date: February 11, 2025

Lam TCP 9400 DSiE G Poly Etcher, 8"
- Software: A4.1-053a
- PM2: TCP 9400 DSiE G - Deep Si Etch
- PM3: TCP 9400 DSiE G - Deep Si Etch
- PM4: TCP 9400 DSiE G - Deep Si Etch
- BASR Option on PM2, PM3 & PM4
- Coulombic ESC - Ceramic
- Mobi Gas Box
- PM2: (10) - Brooks GF 125
- PM3: (10) - Brooks GF 125
- PM4: (10) - Brooks GF 125
- Brooks Automation Mag 7
Dry Pumps:
- Busch DS80 Cobra (3)
- Busch BA100 (2)
Chillers:
- TCU - SMC HRZ 004-L-C Thermo-Chiller (3)
- (3) MKS Cold Traps on foreline above pump
- RPM - Voltage SAG Enhanced
2019 Vintage

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