Novellus / Lam Concept One PECVD
Asset # :
84423
Equipment Make:
Novellus / Lam
Equipment Model:
Concept One
Type:
PECVD
Wafer Size:
6"
Equipment Configuration:
- Si 02 / TEOS
- Process: SiO2-SiN- PSG-BSG-BPSG
- SW Version: 4.31
- Loaders: One arm robot
- Sensors: Wafer detection – cassette door closed
- Gas box: 8 sticks
- Configuration of each process module: One process chamber (SiO 2 - SiN - PSG-BSG -BPSG)
- SMIF: No
- Aligner: No
1990 Vintage
- Process: SiO2-SiN- PSG-BSG-BPSG
- SW Version: 4.31
- Loaders: One arm robot
- Sensors: Wafer detection – cassette door closed
- Gas box: 8 sticks
- Configuration of each process module: One process chamber (SiO 2 - SiN - PSG-BSG -BPSG)
- SMIF: No
- Aligner: No
1990 Vintage
Equipment Pictures:
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Added: October 22, 2024
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Views: 25